Industrial tool

Our industrial tools incorporate the ADE technology in order to deliver throughput values beyond the current industry roadmap. UNIVERSAL etching and texturing equipment and process for any type of silicon wafer or layer; a trully future-proof solution.

The tool is designed using multiple parallel lines of processing and atmospheric pressure chemical reactors similar to the one used in our development tool. The industrial process will be facilitated by the use of on-site generation of the etching gas, providing 100% concentration and delivering low cost of owner ship.

> UNIVERSAL, FUTURE PROOF DRY ETCHING

Universal silicon etching/texturing solution. Enables the use of diamond wire cut wafers, epitaxial wafers, cast wafers, mono and multi crystalline. Also suitable for Si deposited layers, like amorphous silicon (a-Si) and polysilicon layers. 

Latest News

25/03/21 SiPV 2021 + nPV Workshop - conference

We will be attending the online SiPV + nPV Workshop conference, hosted by the Institute for Solar Energy Research Hamelin (ISFH) from the 19-23 of April 2021.


19/03/21 Fraunhofer ISE integrates ADE + TOPCON

Fraunhofer ISE institute to publish their TOPCON + ADE process at EUPVSEC 2021 Lisbon.


More news...


> INLINE SCALABLE PROCESS

Inline process, high throughput, and on-site generation of etching gases facilitate scalability of the manufacturing process.

> NO Green House Gases

Improves the overall sustainability of the manufacturing process; process without any Green House Gases (GHG)resulting in Zero Global Warming Potential (GWP).

> Low reflectivity texture

Outperforming industry standards with wafer surface reflectivity Rw values adjustable to lower levels.

> True Single side processing

The back side is untouched. Enables advanced cell architectures, simplify process flow, whilst also reducing processing costs.

> Very small footprint

ADE3000_footprint

Products

R&D tool

COMPACT, SINGLE SIDE, DRY ETCH ADE TOOL

Industrial tool

Industrial ADE dry etching tool: FUTURE-PROOF SOLUTION